Horizontal Silicon Carbide Epitaxial Furnace

SCML320A

Horizontal Silicon Carbide Epitaxial Furnace

Stable process and high growth rate;

01

Multi-channel gas intake structure, wafer surface zone control, and good film thickness and concentration uniformity;

02

Simple thermal design, convenient assembly and disassembly, and extremely low consumable costs;

03

Equipped with EFFM wafer loading system to eliminate human-caused process contamination;

04

Our address

No. 49, Zonghui Road, Nanjing Economic and Technological Development Zone


sales@cgee.com.cn

Email us anytime for any kind of quety.


+86-025-86660150

Call us any kind suppor, we will wait for it.

Get a quote

CONTACT US
%{tishi_zhanwei}%