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Semiconductor CZ Growers
SCG200/300/400/600 semiconductor CZ grower series is designed to grow 8-12”semiconductor Si materials (both lightly and heavily doped), as well as Si consumable parts up to 24”. The grower is equipped with transverse superconducting magnet (or CUSP superconducting magnet), low power consumption/high process stability hot zone, and most advanced control system. The product series has the following key features:
▪ Optimal structural designs with high level cleanliness/vacuum integrity/reliability/productivity;
High-precision pull head/crucible lift combined with on-line detection ensures an accurate growth and crystal defect control;
▪ A Siemens PLC hardware platform integrated with advanced control algorithms ensures a high repeatability/stability and high automation level of growth control;
▪ Developed many unique control algorithms for better crystal yield and defect control, such as ADC7 (optimal necking pull rate control), ADC4 (slope control of crown growth), ADC8/ADC9 (A fast power/pull rate adjustment control), ADC 10 (locked-in pull speed control for the growth of perfect silicon material) etc;
▪ Developed a unique melt-gap measurement and control method incorporated with Al deep learning algorithms, ensuring an accurate and reliable crystal defect control;
▪ A low power consumption hot zone with a special structure design gives a stable and consistent crystal growth process and long lifetime of hot zone components;
▪ Offer customers strong process support and customized services; capable of providing customers with turn-key solutions, including CZ grower+ hot zone+ process+ growth data management system.
