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Hot Zone Consumables
Our tantalum carbide (TaC) coating created via chemical vapor deposition (CVD) is dense, highly pure, and has a strong bounding with graphite, which can provide exceptional protection for graphite components used in harsh semiconductor manufacturing, aerospace, and crystal growth areas. TaC coating can shield graphite surfaces from extreme temperatures (up to 2400 °C), chemical corrosion, and abrasive vapors, as a result, it can extend the lifespan of graphite components, suppresses impurity migration, and increases manufacturing yields.
Typical applications include:
Semiconductor Equipment: MOCVD heaters, wafer carriers, satellite disks, plasma etching chamber components etc.
High-Temperature Industry: Hot zone components for crystal growth furnaces, high-temperature furnace linings, heating element protection tubes etc.
Corrosive Environments: Molten metal processing, linings for specialty chemical reaction vessels etc.
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Our website uses cookies and similar technologies to personalize the advertising shown to you and to help you get the best experience on our website. For more information, see our Privacy & Cookie Policy
COOKIES
Our website uses cookies and similar technologies to personalize the advertising shown to you and to help you get the best experience on our website. For more information, see our Privacy & Cookie Policy
These cookies are necessary for basic functions such as payment. Standard cookies cannot be turned off and do not store any of your information.
These cookies collect information, such as how many people are using our site or which pages are popular, to help us improve the customer experience. Turning these cookies off will mean we can't collect information to improve your experience.
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These cookies help us understand what you are interested in so that we can show you relevant advertising on other websites. Turning these cookies off will mean we are unable to show you any personalized advertising.
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