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Hot Zone Consumables


Our tantalum carbide (TaC) coating created via chemical vapor deposition (CVD) is dense, highly pure, and has a strong bounding with graphite, which can provide exceptional protection for graphite components used in harsh semiconductor manufacturing, aerospace, and crystal growth areas. TaC coating can shield graphite surfaces from extreme temperatures (up to 2400 °C), chemical corrosion, and abrasive vapors, as a result, it can extend the lifespan of graphite components, suppresses impurity migration, and increases manufacturing yields. 
Typical applications include:
Semiconductor Equipment: MOCVD heaters, wafer carriers, satellite disks, plasma etching chamber components etc.
High-Temperature Industry: Hot zone components for crystal growth furnaces, high-temperature furnace linings, heating element protection tubes etc.
Corrosive Environments: Molten metal processing, linings for specialty chemical reaction vessels etc.